Abstract
A diaphragm-type optical fiber pressure sensor, which has a sleeve for fiber insertion, is proposed, and the fundamental characteristics of this sensor are demonstrated. The sleeve structure is fabricated by DRIE (Deep Reactive Ion Etching). The diaphragm with a sleeve is suitable for highly reliable and easy bonding between the sleeve and the optical fiber. The light intensity change detection by the Fabry–Perot interferometer based on the pressure is increased by the improved DRIE method. The mass production method of the developed diaphragm will be useful for creating a low-cost pressure sensor. © 2009 Wiley Periodicals, Inc. Electron Comm Jpn, 92(8): 36–42, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/ecj.10044
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