Abstract
An ultra high resolution scanning microscope (UHRSEM) which is composed of a cold cathode field emission electron gun and an in-lens system for specimens, has been introduced. Probe size is estimated approximately 0.5∼0.7 nm at an accelerating voltage of 30 kV by calculation, and it was confirmed experimentally using high atomic number fine particles. Fine metal oxide particles and semiconductor materials were observed directly without any metal coating. A necessity of the UHRSEM has been discussed especially for low voltage SEM (LVSEM) to obtain fine topographical details of the samples, which are very sensitive to the scanning electron beams.
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