Abstract
TiO2 nanopores were fabricated on gold interdigitated silicon substrate by electrochemical anodization. The photoresponse of TiO2 nanopores under illumination was studied in a wide range of wavelengths from the near ultraviolet to infrared regions. The crystal structure and morphology of the samples was characterized by XRD and SEM. The electrical properties have been studied by making measurements of I–V curves with and without illumination. The manufactured device showed an ultrafast photoresponse with response and recovery time values reaching 10 ms/70 ms at 395 nm, 50 ms/230 ms at 560 nm and 7 ms/14 ms at 945 nm at bias voltage 1 V. The results suggest that the obtained TiO2 nanopores via anodized method are promising for broadband optoelectronic from ultraviolet to near-infrared range device applications.
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