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Abstract
We propose and experimentally demonstrate an ultra-compact silicon photonic crystal nanobeam (PCN) cavity with an energy-efficient graphene micro-heater. Owing to the PCN cavity with an ultra-small optical mode volume of 0.145 µm3, the light-matter interaction is greatly enhanced and the thermo-optic (TO) tuning efficiency is increased. The TO tuning efficiency is measured to be as high as 1.5 nm/mW, which can be further increased to 3.75 nm/mW based on numerical simulations with an optimized structure. The time constants with a rise time constant of τrise = 1.11 μs and a fall time constant of τfall = 1.47 μs are obtained in the experiment.
Highlights
Silicon photonics is considered as an ideal platform for on-chip integration, owing to the advantages of compact footprint, low power consumption, and compatibility with complementary metal-oxide-semiconductor (CMOS) processes [1]
We propose and demonstrate a silicon photonic crystal nanobeam (PCN) cavity with an energy-efficient graphene micro-heater
The time constants with a rise time constant of τrise = 1.11 μs and a fall time constant of τfall = 1.47 μs are obtained
Summary
Silicon photonics is considered as an ideal platform for on-chip integration, owing to the advantages of compact footprint, low power consumption, and compatibility with complementary metal-oxide-semiconductor (CMOS) processes [1]. Various integrated optical devices based on silicon photonics have been demonstrated, such as optical filters [2], photodetectors [3], electro-optical modulators [4], and electro-optical switches [5]. Graphene has a high thermal conductivity of up to 5,300 W/m · K [16], which is ~300 times higher than that of Titanium [17] With these unique properties, graphene is considered as an excellent material for transparent micro-heaters integrated on optical devices. A high-efficiency graphene micro-heater on a slow-light silicon photonic crystal waveguide was demonstrated [21].
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