Abstract

Silicon Mach-Zehnder modulators (MZMs) utilizing carrier depletion usually adopt traveling-wave (TW) electrodes for their long phase shifters, which have inherent challenges in miniaturization, limiting the integration density of monolithic transceivers. In this work, we experimentally demonstrate non-TW carrier-depletion MZMs that give better compromises between compact footprint, modulation depth, and high speed. They adopt densely meandered phase shifters and thus offer an ultra-compact lumped-element MZM for using carrier depletion. Up to 28.1 Gb/s NRZ eye diagrams and ~26 GHz electro-optic bandwidth were experimentally achieved. The proposed lumped circuit model well explains the experimental data, indicating that impedance mismatching is the dominant factor in determining experimental bandwidth and a LC resonance contributes to the bandwidth improvement. Driving configurations with better impedance matching are proposed to further improve bandwidth. This novel MZM can enhance the integration density of modulators in wavelength-division multiplexing transceivers.

Highlights

  • Optical transceivers are continuously miniaturized for low-cost, low-power, and high-density optical interconnects [1]

  • In [24], using the same concept as that in [14], we experimentally demonstrated a non-traveling-wave (NTW) Mach-Zehnder modulators (MZMs) (NTWMZM) by employing a densely meandered phase shifter, which for the first time reported the experimental results of a lumped-element MZM modulator based on carrier depletion without utilizing slow-light effects [7,8], as far as we know

  • We study the impedance matching with considering the effect of LC resonance on bandwidth since in our experiment we found the inductance of comb-like electrodes can contribute to bandwidth enhancement via inducing a LC resonance

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Summary

INTRODUCTION

Optical transceivers are continuously miniaturized for low-cost, low-power, and high-density optical interconnects [1]. With such a phase shifter design, we can realize a lumped-element carrier-depletion MZM with both a small footprint and a reasonable length of phase shifter. Note that the S electrodes are connecting to the n-side of diodes

Transit time determined bandwidth
Bandwidth comparison between NTW and TW MZM
Device and measurement
NRZ eye diagram
EO bandwidth
Impedance matching problem
Driving configuration for impedance matching
Findings
CONCLUSION

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