Abstract
Abstract The growth of self-organized nanoislands and nanowires on a substrate has been extensively studied with a view to fabricating the new functional materials and advanced electric devices. in the present work, Pd silicide islands and wires grown on Si (111) 7x77×7surface were observed in situ by ultrahigh vacuum transmission and reflection electron microscopy (UHV-TEM/REM). Pd was deposited on Si (111) 7×7 surface at about 700 K using an electron beam evaporator attached to the column of a UHV microscope. Two kinds of specimens were prepared: a <111> oriented rectangular specimen with a thin area, whose (111) top surface was observed by plan viewed TEM, and a <110> oriented bulk rectangular specimen, whose (111) side surface was observed by REM Figure la shows a REM image of Si (111) 7×7 surface. An incident electron beam is directed from the top to the bottom of the figure, which is foreshortened in the beam direction.
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