Abstract
This paper presents a new adaptive sliding mode control (ASMC) scheme with uncertainty and disturbance estimation (UDE) technique dedicated to precise motion tracking control of a piezoelectrically actuated nanopositioning stage. Unlike the conventional SMC scheme based on a discontinuous control, a smooth control action is devised based on UDE method to eliminate the use of nonlinear switching action in the SMC scheme. The reported ASMC control scheme is easy to realize because the hysteresis is not needed to be modeled. Alternatively, the hysteresis is estimated and compensated by the robust control scheme. The stability of the chattering-free sliding mode control strategy is demonstrated based on Lyapunov analysis. The effectiveness of the control scheme has been verified by conducting both simulation and experimental studies. The reported ASMC strategy can be expanded to robust control for other kinds of motion systems.
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