Abstract

At the heart of a high-vacuum pumping system is the high-vacuum pump. This chapter provides information necessary for selection, operation, and general maintenance of these critical vacuum-system components. Unlike the low-vacuum pumps described in Chap. 8 that rely on the mechanism of positive displacement to yield pressure reduction, high-vacuum pumps generally rely on the pumping mechanisms of either momentum transfer or capture. To be effective, momentum transfer requires well-considered control of rapidly moving molecules or surfaces, while capture requires equally well-considered control of surface conditions—such as temperature, adsorption processes, and/or chemical reactivity. This chapter will discuss how these controls are implemented, how different gas molecules respond to these mechanical or surface conditions, and what general maintenance is required to maintain optimum life expectancy for high-vacuum pumps.

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