Abstract

Abstract Based on a 2D temperature model in cylindrical coordinate for multilayer thin films irradiated by a Gaussian laser beam, the 2D temperature field for two-layer structures of a transparent diamond thin film on an opaque silicon substrate is obtained by using FEM method. Besides, the influence of the heat conductivity of the diamond film on surface temperature of the bilayered structures is also calculated. The results show that it may be a good method by using the surface temperature attenuation curves to characterize the heat conductivity of the diamond film.

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