Abstract
A two-dimensional self-consistent kinetic model was developed tostudy the influence of the various factors on the electron energydistribution function. These factors include gas pressure, thedriving frequency, the radius and length of the inductively coupledplasma equipment, the amplitude of the radio-frequency coil current,and the number of turns of rf coils. The spatial profiles of the rfelectric field and power density have also been calculated under thesame parameters. Numerical results show that the electron energydistribution functions are significantly modified and the spatialprofiles of the rf electric field and rf power density are alsodemonstrated.
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