Abstract
Ridge waveguide lasers with an integrated 2D photonic crystal (PC)mirror have been successfully fabricated on anInGaAs/AlGaAs laser structure emitting around 995 nm. Theinvestigated 2D PCs consist of air holes in a semiconductorarranged in a triangular lattice with periods from a = 180 to400 nm with different lattice orientations. This is fabricatedusing high-resolution 100 kV electron beam lithography inconnection with a triple-metal-layer mask and electroncyclotron resonance dry etching, yielding etch depths around550 nm. The capability of this fabrication technology forsemiconductor feature sizes down to 30 nm is demonstrated.The performance of the lasers with a PC mirror with respect toboth laser threshold and differential efficiency clearlydepends on the period and orientation of the PC lattice. Thisbehaviour can be understood using simulations of the PCreflectivity based on 2D transfer matrix methods andfinite-element analysis of the waveguide properties. Thefeedback from the PC mirror is confirmed using Fouriertransform reflectometry analysis of a sub-threshold laserspectrum.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
