Two-dimensional conveyance system using cooperative motions of many fluidic microactuators

Abstract

We have proposed the concept of distributed micro motion systems (DMMS) in order to coordinate simple motions of many microactuators arranged on a wafer so as to perform a more complicated task. A two-dimensional conveyance system in a plane is studied as an example of DMMS. A system design has been presented with the aim of controlling many microactuators in a similar way as the cellular automaton. In this paper, we focus on a microactuator and define a micro-axel as an elemental unit of DMMS. As the first step towards the implementation of the designed two-dimensional (2D) system, we have previously reported the development and operation of a one-dimensional conveyance system using a fluidic micro-axel array. Here, this paper describes the design, fabrication and operation of a fluidic micro-axel array for the 2D conveyance system. The developed system was capable of performing the positioning task and experiments to convey objects to the fixed desired position by the system were performed successfully. The fabricated system was also integrated with a through hole wire array based on the concept of a multi-layer method.