Two-dimensional calculation of spatial distribution of neutral atoms for a planar inductively coupled oxygen discharge

Abstract

Two-dimensional self-consistent fluid simulation of inductively coupled oxygen plasma is presented. The model equations include continuity equations for charged species and neutral oxygen atom, the Poisson equation, and the electron energy balance equation. The drift–diffusion approximation is employed. From the Maxwell equations, the induced electric field and absorbed power are calculated. The two-dimensional spatial distributions of charged species densities, charged species flux, density and flux of atomic oxygen, electric potential, and electron temperature are calculated. The effect of the gas pressure on the plasma uniformity is investigated. As the pressure increases, the spatial distributions of charged species and neutral atom have their peak values in the toroidal region where a large amount of the input power is absorbed by the plasma.