Abstract

ABSTRACTLarge area hydrogenated amorphous silicon single and stacked p-i-n structures with low conductivity doped layers are proposed as monochrome and color image sensors. All have the same intrinsic layer and in the doped layers the resistivity and optical gap was controlled through the addition of methane to the doping gas. The current-voltage characteristics and the spectral sensitivity under different illumination conditions are analyzed. The sensor output characteristics are evaluated under different read-out voltages and scanner wavelengths. To extract information on image range, intensity and color, a modulated light beam scans the sensor active area at three appropriate bias voltages and the photoresponse in each scanning position (“sub-pixel”) is recorded. The investigation of the sensor output under different scanner wavelengths and varying electrical bias reveals that the response can be tuned, thus enabling color separation. The operation of the sensor is exemplified and supported by a numerical simulation.

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