Two Photon Polymerization Micro/Nanofabrication of Suspended Nanorods in Organically Modified Ceramics

Abstract

Organically modified ceramics are used as photoresistors in the present work. The role of every ingredient played in two photon polymerization process is analyzed. A simple, compact and easy to locate experimental scheme is designed to fabricate nanorods in Ormocer. Based on the threshold theory of photon intensity, the lateral size dependences and vertical size dependences of nanorods on laser power and scanning speed are investigated, respectively. Through systematically changing processing parameters, a 136[Formula: see text]nm Ormocer suspended nanorod which is beyond diffraction limit resolution is obtained when [Formula: see text]m/s, [Formula: see text][Formula: see text]mW. By this means, two photon polymerization techniques show great potential to obtain a limiting resolution of Ormocer. What is more, micro gear, micro chair, photonic crystal and micro annular lens are fabricated in two photon polymerization in order to exhibit excellent mechanical and optical property of Ormocer.