Abstract
With respect to the investigation of low pressure filament-assisted chemical vapor deposition processes for diamond formation, absolute concentrations of atomic hydrogen were determined by two-photon laserinduced fluorescence in the vicinity of a heated filament in an environment containing H(2) or mixtures of H(2)and CH(4). Radial H concentration profiles were obtained for different pressures and filament temperatures, diameters, and materials. The influence of the addition of various amounts of methane on the H atom concentrations was examined.
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