Abstract
Ronchi lateral shearing interferometry is widely applied in wavefront measurement of advanced lithography tools. In Ronchi lateral shearing interferometry, higher-order diffraction beam interference is a common challenge, currently mitigated by introducing more phase shifts, resulting in extended measurement times and added errors. In this study, we propose a nonlinear optimization approach that combines a 2-frame phase-shifting algorithm to suppress the influence of high diffraction orders, reducing the required number of phase shifts by more than 75%. We formulate a numerical model that aligns with the interferometry, construct a highly robust error function, and enable high-precision wavefront reconstruction by optimizing Zernike coefficients. The accuracy and robustness of the proposed method are verified through simulations and experiments.
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