Abstract

A more precise but easy-to-use model is developed and proposed to clarify nanoparticle growth with two-component co-condensation in thermal plasma processing. Computations performed for the molybdenum-silicon and titanium-silicon systems demonstrate that the model quantitatively estimates both the particle size distribution and the composition distribution of the silicide nanoparticles produced through co-condensation as well as nucleation and coagulation. The model also successfully obtains information that cannot be acquired by any other models. As a consequence, the detailed growth mechanisms of the silicide nanoparticles are eventually revealed. The present model is thus an “adaptable” and useful tool for analyzing nanoparticle growth processes, including co-condensation, with sufficient accuracy.

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