Two-Dimensional Titanium Carbides (Ti3C2) Mxene-Based Patterned-Electrodes for High Capacity Micro-Supercapacitors

Abstract

With the fast growth of wearable & miniaturized electronic devices, internet of things (IoT), and 5G telecommunications, the need for ultrathin, lightweight, and flexible energy storage devices has expanded significantly. Micro-supercapacitors (MSCs) with electrically isolated interdigitated electrodes, have attracted great interest as major power sources for micro-electronic devices, offering high power efficiency, superior rate capability, and excellent cycle durability. MXenes, two-dimensional (2D) metal carbides and nitrides, have been considered as a promising candidate for state-of-the-art energy storage applications, due to their intriguing combinational properties such as excellent electrical conductivity, large surface area, tunable surface chemistry, and pseudo-capacity. 1 In this work, we report titanium carbides (Ti3C2) MXene-based MSCs with sub-micron gap between electrodes exhibiting high areal capacitance and superior rate capability, realized by microfabrication method based on focused ion beam (FIB) and photolithography.2 We also demonstrate a facile and reliable process for scalable manufacturing of on-chip and flexible MSCs for wearable/portable and miniaturized microelectronics. The MXene MSCs fabricated utilizing the cutting-edge nanofabrication technology in an 8-inch wafer have shown an outstanding volumetric capacitance and stable cyclic performances, suggesting the developed manufacturing process can accelerate commercialization of MXene-based energy storage devices as power sources for next-generation wearable and miniaturized microelectronics.3 [References] 1 Energy Environ. Sci. 9 2847 (2016) 2 Nano Energy 81 (2021), 105616 3 Chem. Eng. J., 450, 138456 (2022)