Abstract
A two-dimensional self-consistent simulation of a miniaturized inductively coupled plasma (mICP) reactor was developed. The coupled equations for plasma power deposition, electron temperature, and charged and neutral species densities, were solved to obtain the spatial distribution of an argon discharge. The effect of control parameters, such as power and pressure, on the evolution of plasma density and electron temperature was investigated. Strong ion density gradients were observed which can make spatially resolved Langmuir probe measurements particularly challenging. Simulation results were in reasonable agreement with available experimental data. The neutral gas temperature was predicted to be close to the wall temperature, due to the small length scale of the mICP, allowing for efficient heat transfer.
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