Two-dimensional polymeric optical waveguides for high-density parallel optical interconnection

Abstract

This paper presents two-dimensional polymeric optical waveguides for high-density parallel optical interconnections and a double-sided hot embossing process. Using this process we have simultaneously fabricated two-dimensional 24 channel optical waveguides. To improve the anti-sticking effect of PMMA to the silicon mold master during the de-embossing process, the mold master was treated with a self-assembled silane monolayer using a vapor deposition process. The minimum propagation loss of the fabricated 2 × 12 channel waveguides was estimated to be 0.198 dB/cm at 850 nm wavelength.