Abstract
A two-dimensional model of the reactive gas flow, heat transfer and electrodynamic phenomena in a d.c. discharge reactor for diamond film deposition has been developed. Contrary to earlier proposed models we calculate the electron-molecule reaction rate coefficients by solving the Boltzmann equation for the electron energy distribution function. These coefficients are used for chemical gas composition calculations. An effective numerical method for solving the chemical kinetics equations has been developed. The electric field strength was determined from the total current conservation condition and the electron balance equation. The spatial distributions and fluxes of the chemical species and the gas flow parameters have been obtained as a result of the self-consistent calculations.
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