Abstract
A novel technique for two-dimensional (2D) electric-field (E-field) vector measurement is described. Laser beams with different propagation paths in an electro-optic (EO) crystal are used to resolve the E-field direction on the wafer. A lithium tantalate (LiTaO 3) crystal with a thickness of 20 μm and a bottom area of 200 μm × 200 μm is used for the experiment. A sensitivity of 1.8 V/cm· Hz is achieved for the E-field strength measurement. The field direction can be identified with a field strength larger than 25 V/cm, and the root-mean-square error is 1.1°.
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