Twenty-nm Resolution Spin-polarized Scanning Electron Microscope

Abstract

A high-spatial-resolution spin-polarized scanning electron microscope (spin SEM) for observing magnetic domains has been developed. We have used a thermal-assisted field emission gun to provide a high, stable emission current. In addition, we have developed an objective lens whose conical shape accommodates a short working distance and enables a secondary electron collector to be placed close to the sample to collect most of the secondary electrons. Included in this system are a newly developed high-efficiency Mott detector, a low-loss secondary-electron collector, and transport optics. As a result, 20-nm resolution has been achieved