Abstract
Different approaches to study vibrational kinetics coupled to electron one for modeling different kinds of negative ion sources are presented. In particular two types of sources are investigated. The first one is a classical negative ion source in which the plasma is generated by thermoemitted electrons; in the second one, electrons already present in the mixture are accelerated by an RF field to sufficiently high energy to ionize the gas molecules. For the first kind of ion source a new computational scheme is presented to couple heavy particle and electron kinetics. Moreover models developed for an RF inductive discharge and for a parallel plate discharge are described.
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