Tuning the sensing range and sensitivity of three axes tactile sensors using the polymer composite membrane

Abstract

This study has successfully demonstrated a novel three axes polymer tactile sensor with built-in piezoresistive sensors. The sensor consists of polymer membrane and four sensing cantilevers with piezoresistors on both top and side walls to measure the in-plane and out-of-plane loads. By adding the nano-particles into the polymer, the stiffness of the membrane can be easily tuned. Thus, the sensing range and sensitivity of the present tactile sensor can also be tuned after the change of polymer membrane stiffness. The fabrication process allows the changing of polymer membrane material easily. The experiments show that the stiffness of the PDMS membrane increases from 1.32 to 479.25MPa after adding Co particles of PDMS/Co=10/1. Meanwhile, the sensitivity of tactile sensor is significantly decreased. However, the maximum tolerable load of tactile sensor is increased.