Abstract
Renewed interest has been witnessed in utilizing the piezoelectric response of PbZr0.52Ti0.48O3 (PZT) films on glass substrates for applications such as adaptive optics. Accordingly, new methodologies are being explored to grow well-oriented PZT thin films to harvest a large piezoelectric response. However, thin film piezoelectric response is significantly reduced compared to intrinsic response due to substrate induced clamping, even when films are well-oriented. Here, a novel method is presented to grow preferentially (100)-oriented PZT films on glass substrates by utilizing crystalline nanosheets as seed layers. Furthermore, increasing the repetition frequency up to 20 Hz during pulsed laser deposition helps to tune the film microstructure to hierarchically ordered columns that leads to reduced clamping and enhanced piezoelectric response evidenced by transmission electron microscopy and analytical calculations. A large piezoelectric coefficient of 250 pm/V is observed in optimally tuned structure which is more than two times the highest reported piezoelectric response on glass. To confirm that the clamping compromises the piezoelectric response, denser films are deposited using a lower repetition frequency and a BiFeO3 buffer layer resulting in significantly reduced piezoelectric responses. This paper demonstrates a novel method for PZT integration on glass substrates without compromising the large piezoelectric response.
Highlights
Perovskite oxides form a special and exciting class of materials which exhibit a wide spectrum of multifunctional physical properties such as superconductivity, photovoltaic effect, colossal magnetoresistance, ferroelectricity and piezoelectricity[1,2,3,4,5]
Epitaxial growth and control on growth orientation was achieved by utilizing crystalline nanosheets of Ca2Nb3O10 (CNO) as seed layers on the glass substrates as explained in detail with relevant literature[29] in our previous report[44]
LaNiO3 (LNO) electrodes and the PZT films were grown on the nanosheet-buffered glass substrates using pulsed laser deposition (PLD)
Summary
Perovskite oxides form a special and exciting class of materials which exhibit a wide spectrum of multifunctional physical properties such as superconductivity, photovoltaic effect, colossal magnetoresistance, ferroelectricity and piezoelectricity[1,2,3,4,5]. Experimentally it is probed that submicron size PZT capacitors have four times larger piezoelectric response in comparison to the large scale capacitors[40] This larger piezoelectric response was later reported to be a primary manifestation of reduced clamping effect[41]. We report on hierarchically ordered columnar growth of crystalline PZT films with preferred (100) orientation on glass substrates at a maximum processing temperature of 600 °C and minimization of the clamping effect by tuning the growth conditions. Epitaxial growth and control on growth orientation was achieved by utilizing crystalline nanosheets of Ca2Nb3O10 (CNO) as seed layers on the glass substrates as explained in detail with relevant literature[29] in our previous report[44].
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