Abstract
Multilayer structure as an effective way to tailor the structure and performance of hard coatings has attracted wide attentions. Here, we aim to elucidate the change of the interface, mechanical properties and oxidation resistance for TiAlSiN/TiAlN multilayers by varying modulation ratios from ML (tTiAlSiN/tTiAlN = 1:1) to HML (tTiAlSiN/tTiAlN = 1:2). Increasing TiAlN sublayer thickness stabilizes the cubic growth of TiAlSiN layers, where the HML exhibits coherent epitaxial growth in contrast to the cubic-wurtzite mixed structure of ML. This coherent strengthening effect is responsible for the noteworthy enhancement of the hardness values from ∼30.9 GPa of ML to ∼33.2 GPa of HML. Significantly, the presence of a coherent interface effectively withstands external pressure, thereby endowing HML with exceptional adhesive strength and fracture toughness. Nevertheless, the oxidation resistance of the coating is reliant on the chemical composition, with the multilayers displaying lower oxidation resistance compared to the TiAlSiN monolayer.
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