Tuning Effect on the Electron Energy Distribution Function ofan Inert Gas Mixture in nitrogen Inductively Coupled Plasma Discharges

Abstract

By using a Langmuir probe, the electron energy distribution function(EEDF) is measured in inductively coupled plasma discharges inN2/Ar mixtures at 200 W rf powers. In pure N2 discharges aMaxwellian EEDF is observed. When the mixing ratio of Ar increases, thedistribution of high-energy electrons evolves with a different trendfrom that of low-energy electrons, resulting in an apparent ``twotemperature structure'' of the EEDF. We discuss this non-MaxwellianEEDF and its effect on the measurement and the interpretation of``electron temperature'' by both the probe and line ratio technique.