Abstract
Since vanadium dioxide (VO2) is a phase change material that shows a metal to insulator transition behavior at a temperature near 68℃, it has many potential applications in the areas of science and engineering. In this study, tungsten (W) -doped VO2 thin films were synthesized by pulsed laser deposition (PLD) technique with a metallic vanadium target and W-wires which were simply attached on the surface of the vanadium target. Also, bowtie RF antenna structures were fabricated by using the films to check the frequency tunability. The experimental results show a decrease of the transition temperature and a broadening of the phase transition as the atomic percentage of W increases in the film structure. The results also reveal that the W-doped VO2 thin film based RF antenna was fully functional with the successful frequency tuning capability.
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