Abstract
Target at improving the machining efficiency for diamond turning of micro-structured surfaces on brittle materials, a general technique named tuned diamond turning is proposed through strictly matching the maximum depth-of-cut with the critical one during turning, and the correspondingtoolpath planning algorithm is developed. Practically, a novel piezo-actuated dual-axial fast tool servo system is introduced to realize the tuning concept, and a typical micro-structured surface free from cracks is successfully generated on a single crystal silicon wafer. Compared with fast-/slow tool servo, the machining efficiency is improved by a factor of 16.35%, demonstrating the effectiveness of the tuned diamond turning.
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