Abstract
This work presents the characterization of ferroelectric Aluminum Scandium Nitride (AlScN) thin films for multi-frequency high-order overtone mode resonators used in radio frequency (RF) filtering applications. Three types of AlScN-based thickness-extensional (TE) mode resonators are cofabricated on the same silicon-on-insulator (SOI) platform, 1) High-overtone Bulk Acoustic Resonator (HBAR), 2) Composite Film Bulk Acoustic Resonator (C-FBAR), and 3) Thin Film Bulk Acoustic Resonator (FBAR). We report on the experimental results and analysis of acoustic characteristics and ferroelectric behavior in the Al<inf>0.7</inf>Sc<inf>0.3</inf>N-based thickness extensional (TE) mode resonators with these different substrate configurations. We observed the effect of thin-film stress on coercive field and evaluated the loss mechanism depending on a substrate layer underneath the sandwiched piezoelectric structure.
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