Abstract
A novel concept for micromechanical tunable optical filter (TOF) with porous-silicon-based photonic crystals which provide wavelength tuning of ca. ±20% around a working wavelength at frequencies up to kilohertz is presented. The combination of fast mechanical tilting and pore-filling of the porous silicon multilayer structure increases the tunable range to more than 200 nm or provides fine adjustment of working wavelength of the TOF. Experimental and optical simulation data for the visible and near-infrared wavelength range supporting the approach are shown. TOF are used in spectroscopic applications, e.g., for process analysis.
Highlights
Tunable optical filter (TOF) is used in spectroscopic applications e.g., for process analyses
Over the last few years, research has been focusing on miniaturizing TOF for applications in microoptical electromechanical systems (MOEMS)
TOF systems based on MOEMS Fabry-Perot interferometers (FPI) have been reported, where wavelength tuning results from changing the gap between the involved mirrors and requires an extremely precise control of the micromechanical movement [1,2,3,4]
Summary
Tunable optical filter (TOF) is used in spectroscopic applications e.g., for process analyses. Over the last few years, research has been focusing on miniaturizing TOF for applications in microoptical electromechanical systems (MOEMS). TOF systems based on MOEMS Fabry-Perot interferometers (FPI) have been reported, where wavelength tuning results from changing the gap between the involved mirrors and requires an extremely precise control of the micromechanical movement [1,2,3,4]. Change of spectral response of photonic crystals based on porous multilayers using pore-filling, including fabrication and characterization aspects, and application of this method for sensing were reported by different research groups [7,8,9,10].
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