Tunable Matching Network Using MEMS Switches

Abstract

This paper presents a novel approach in order to construct low-loss reconfigurable impedance matching networks and tuners using MEMS series-contact switches and periodic defected-ground-structures (DGSs) implemented on coplanar waveguide (CPW) transmission lines. The application of DGSs results in an improved insertion loss and power handling capability compared to the conventional RF MEMS impedance tuning networks. The proposed structure consists of 12 DGSs and RF MEMS series-contact switches. The tunable matching network was fabricated on a silicon substrate and is only 1.4×̃˾̈˰̽̽˰̹̾˰̵̹̓͊˾˰̸̵̤˰̵̵̴̱̽̓͂ͅ˰̼̿̓̓˰̶̿˰̸̵̈́˰̵͇̻̾̈́̿͂˰̸̵͇̾˰̵̴̓ͅ˰̈́̿˰̸̱̳̽̈́˰̱˰́̀˰Ω˰̴̼̱̿˰̈́̿˰̅̀˰Ω˰̶͂̿m 5GHz up to 40 GHz is only 0.8 dB. The results show that the tuner can achieve a broadband impedance match for a wide variety of loads that are either purely resistive or that have a large reactance as well.