Abstract

A review of the present status of continuously-tunable coherent vacuum ultraviolet (VUV) radiation sources is presented, focusing on the third-harmonic generation, resonant four-wave sum and difference frequency mixing, and anti-Stockes Raman scattering in gaseous nonlinear media. By using these third-order nonlinear processes in gases, the tunable VUV range of coherent radiation has been successfully extended from 200 nm down to about 70 nm.

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