Abstract
The formation of nanostructures from a thin Au film deposited on a polystyrene and polymethylmethacrylate substrate under keV monatomic P, Ta and molecular PF4 ion irradiation is studied. The formation of nanoparticles on both kinds of polymers is shown. Heavy Ta ions are most effective in altering the Au layer, whereas its transformation by light P or molecular PF4 ions is less pronounced. Irradiation with PF4 ions has a much smaller effect on the PS and PMMA substrate bulk compared to that with monatomic P ions. The crucial role of collision cascade density in the process of thin metallic film coagulation on polymer substrate is revealed. During ion bombardment, transmitted IR light intensity increases proportionally to the area covered by the metal film, which makes it possible to use FTIR as a rapid technique to estimate the state of the nanoparticle formation process.
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