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Abstract
In this paper we present the design and fabrication of an RF MEMS tunable band-pass fllter. The band-pass fllter design uses both distributed transmission lines and RF MEMS capacitances together to replace the lumped elements. The use of RF MEMS variable capacitances gives the ∞exibility of tuning both the centre frequency and the band-width of the band-pass fllter. A prototype of the tunable band-pass fllter is realized using parallel plate capacitances. The variable shunt and series capacitances are formed by a combination of parallel plate RF MEMS shunt bridges and series cantilevers. The fllter operates at C-X band. The measurement results agree well with the simulation results.
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