Abstract

We present thermal tuning of air-suspended SU-8 polymer waveguide grating couplers for TE-polarized light. Numerical simulations have been performed to estimate the wavelength shift caused by the change of temperature. Due to the small positive thermal expansion and large negative thermo-optic coefficient of SU-8, a shift toward shorter wavelengths is expected. In the experimental evaluation, a negative wavelength shift from 1542 nm at 20°C toward 1527 nm at 56°C is obtained with approximately −0.42 nm K−1 matching the theoretical considerations.

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