Abstract
The article consists of a Powerpoint presentation on a new tri-state multi contact lateral MEMS relay which has high mechanical reliability through elimination of mechanical design tradeoffs. The paper concludes that the FEM simulations showed that the tri-state multi contact lateral MEMS relay has high reliability and the testing results showed that the tri-state multi contact lateral MEMS relay has more stable switching actuation without stiction failure compared with mono-state single-contact MEMS relay.
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