Abstract
We present computational simulation and experimental results of ambient air atomic force microscopy (AFM) characterization with simultaneous excitation and control of three eigenmodes of a rectangular microcantilever beam. Trimodal characterization combining amplitude and frequency modulation is an enhancement of the capabilities of the AFM technique, which could allow the rapid acquisition of topographical, phase, and frequency shift contrast with a single surface scan at normal scan rates. The results suggest that, in general, the phase and frequency shift contrast are affected similarly but in opposite directions by the tip-sample interactions, although deviations from this trend are often observed in the experiments, such that all available sources of contrast could provide complementary information on surface properties.
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