Triple crystal x-ray diffractometry of periodic arrays of semiconductor quantum wires

Abstract

Kinematical diffraction theory and the optical coherence formalism have been used for calculating the diffuse x-ray scattering from periodic quantum wires. The method calculates the distribution of the diffusely scattered intensity in the reciprocal lattice plane. The simulated distributions have been compared with those measured on a InAs/GaAs quantum wire by means of triple crystal x-ray diffractometry and a good agreement has been achieved. The method can be applied to studies of internal stress relaxation in quantum wires.