Abstract
In the design of a W/C multilayer mirror, we applied a trilayer model to consider the interdiffusion of tungsten and carbon on the W-on-C interface and investigated the first Bragg angle and its reflectivity. As the interdiffusion thickness of a W/C multilayer mirror increased, the first Bragg angle and the reflected X-ray energy increased. However, as the period thickness of the W/C multilayer mirror increased, the effects of the interdiffusion became less pronounced. The criteria for the use of either the bilayer or the trilayer models for the design of W/C multilayer mirrors were presented for various period thicknesses. The trilayer model would be useful for the design of multilayer mirrors with a small period thickness of less than approximately 4.0 nm at an interdiffusion of 0.28 nm.
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