Abstract
Improving the hardness of amorphous carbon nitride with tantalum was realized by using ion beam assisted filtered arc deposition to obtain a low friction coefficient and low specific wear rate in ambient air. The coatings were prepared with different nitrogen flow during coating at different discharge cycles of tantalum. The wear scar and as-deposited surfaces were observed and analyzed by means of FESEM, AES, XPS, and Raman analysis. The lowest friction coefficient (~0.07) was obtained for ta-C:Ta200, which exhibited a low specific wear rate of < 1.0 × 10−7 mm3/Nm. The XPS analysis revealed the existence of amorphous Ta2O5, and the friction coefficient seemed to be positively correlated with oxygen desorption from the coatings.
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