Abstract
Titanium nitride (TiN) films have been developed by a dynamic ion beam mixing (DM) process, which combines Ti vapor deposition with simultaneous nitrogen ion beam irradiation. Tribological properties of DM TiN film on martensitic stainless steel have been investigated concerning their application to dry gas seal materials for compressors and turbines. The microhardness, adhesion force, wear resistance and frictional coefficient properties of DM TiN film were investigated and compared to conventional hard materials such as arc ion plating (IP) TiN film, chromium carbide (Cr 3C 2) thermal spray coating and tungsten carbide (WC) hard alloy. The results show wear resistance and friction in TiN films prepared by the DM process to be superior to that in conventional hard materials.
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