Abstract

In nitride films, an enhanced lubrication effect has been achieved through the incorporation of a soft metal element such as Ag. However, at medium and high temperatures, the favorable tribological properties cannot be sustained for an extended period due to the rapid depletion of Ag. To address this issue, a multilayer film design with W element doping is conceived to impede Ag depletion. MoN (Ag‐W)‐MoS2 (W) multilayer films with 4 different layers are prepared, and their tribological properties are systematically characterized across temperatures ranging from 25 to 800 °C. The results indicate that the tribological properties of four different multilayer films vary considerably at different temperatures. The 8‐layer multilayer film exhibits a relatively low friction coefficient that can be maintained at wide‐range temperatures. X‐ray diffractometer patterns are obtained before and after the friction test to elucidate the lubrication phases of different layers within the multilayer films at various temperatures. Additionally, 3D profiles of wear trajectory surfaces are generated, revealing enhanced wear resistance achieved by effectively inhibiting the migration of Ag. The low friction coefficient in multilayer films can be attributed to the oxidation of MoS2 and the generation of new lubrication phases, as confirmed by Raman spectra analysis.

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