Abstract
This study narrates the findings regarding investigation of tribological properties of BxC:Hy thin films deposited by Radio Frequency Plasma Enhanced Chemical Vapour Deposition (RF-PECVD) technique. To study tribological properties, two sets of films were prepared with variation in composition and thickness by tuning deposition parameters. Tribological properties were studied in ambience for three different applied vertical load values (5, 10 and 15 N). Lower self-bias (−75 V) seems advantageous for synthesis of BxC:Hy films offering superior hardness, lubricity and wear resistance in tribologically stressed conditions. For a given composition, the film with the highest thickness (∼3 μm) exhibited better friction and wear resistance, offering lowest co-efficient of friction (COF) ∼0.23 for 5 N load and specific wear rate of 2.56 × 10−5 mm3/Nm for 10 N load. Lower self-bias during deposition (−75 V) seems advantageous for synthesis of BxC:Hy films having high hardness (∼2800 HK) and excellent Co-efficient of friction (COF).
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