Abstract
Amorphous hydrogenated carbon (C:H) films show extremely low friction coefficients of the order of 0.01 in vacuum. On the contrary, diamond-like carbon (DLC) films composed of a mixed diamond and graphite structure have a high friction coefficient in vacuum. Amorphous hydrogenated SiC (SiC:H) films also have similar, extremely low friction coefficients in vacuum. For amorphous SiC:H films containing over 15 at.% Si, an extremely low friction coefficient cannot be obtained. High temperature (600°C) annealing changes the amorphous SiC:H structure into a crystal-like Si−C structure. These annealed films do not have an extremely low friction coefficient. Micro-IR spectroscopy reveals that the extremely low friction performance is attributable to an oriented hydrocarbon film that transferred from the carbon film onto the ball surface during sliding.
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