Abstract
The knowledge of tribological properties of silicon is important due to its potential application for micromechanical devices. The present work focuses on the friction and wear studies of single crystal silicon (100) implanted with carbon and nitrogen at 60 keV. These tests were performed using a pin-on-disc (POD) apparatus with a 52100 pin, under contact stress of 225 MPa and at 35% relative humidity. Changes in surface roughness before and after the wear tests were studied using atomic force microscopy (AFM). Transmission electron microscopy (TEM) investigations and ion-channeling measurements revealed amorphous phases for all the implanted species at all doses. Although the surface hardness measurements performed by nano-indentation indicated no improvement in surface hardness for samples implanted with carbon, the tribological studies indicated an improvement in wear and frictional properties. We relate this improved wear behavior to the formation of amorphous SiC.
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