Abstract
Zr-C:H:Nx% coatings with nitrogen additions ranging from 0 to 29 at.% are deposited on AISI M2 steel substrates and micro-drills using a closed field unbalanced magnetron (CFUBM) sputtering technique. The tribologi- cal properties of the coatings are tested against AISI 52100 steel balls under loads of 10 and 100 N, respectively, using an oscillating friction and wear tester. The drilling perfor- mance of the coated micro-drills is evaluated by performing high-speed through-hole drilling tests using printed circuit boards as a test material. The wear testing results reveal that the Zr-C:H:N8% coating has excellent tribological properties, including a low wear depth, a low friction coefficient, and an extended lifetime. Meanwhile, the dril- ling tests reveal that the Zr-C:H:N8% coating increases the tool life of the micro-drill by a factor of five compared to an uncoated micro-drill when used for the high-speed through- hole drilling of PCBs and yields a considerable improve- ment in the machining quality of the drilled hole.
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