Abstract
The effect of the pressure of the nitrogen atmosphere during the formation of vacuum arc nitride coatings based on high entropy alloys of the Ti-Zr-Hf-V-Nb-Ta system on their structure, hardness, and tribotechnical characteristics is considered. It is shown that strong nitride-forming components lead to the dependence of the structural state and properties on the pressure of the nitrogen atmosphere during coating deposition. Deposition at a nitrogen pressure of 0.4 Pa results in the formation of a texture with the [111] axis when the applied bias potential is −70 V and when the bias potential is equal to −150 V the textural structure is biaxial ([111] and [110]) textures and high value of hardness of 51 GPa Along with that the highest value of wear resistance (under oxidizing-mechanical wear) is inherent to coatings formed under the pressure of nitrogen of 0.09 Pa. The strongest microdeformation of coating crystallites corresponds to this pressure.
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